P-915KWEF Piezo Hexapod

Fine Adjustment and Active, Dynamic Error Correction

Load capacity up to 1500 g
Min. incremental motion 1 nm / 0.07 µrad
Travel ranges to 70 µm
Capacitive sensors for dynamic scanning and precision positioning

Highly dynamic reference-class 6-axis positioning system

Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serial-kinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction.

Piezo actuator direct drives with high stiffness and resonant frequency for dynamic positioning.

A powerful real-time digital controller controls the drive axes

 

Capacitive position sensors

Direct, absolute position measurement with subnanometer accuracy and a high bandwidth and stability

 

Applications

Dynamic optimization of axial runout, eccentricity and evenness of rotation stages. Vibration insulation, fine adjustment

Specifications

pdf
pdf

Datasheet P-915KWEF

2015-03-30
2015-03-30
pdf - 702 KB
pdf - 698 KB

Ordering Information

This product is currently not in our price list.

It is an example of what is feasible with our technology. We would like to work with you on a solution that fits your needs.
P-915KWEF
Piezo Hexapod for Active and Dynamic Correction of Angular Errors of Rotation Stages

Downloads

Datasheet

pdf
pdf

Datasheet P-915KWEF

2015-03-30
2015-03-30
pdf - 702 KB
pdf - 698 KB