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- ProductsProductsPI is a worldwide leading supplier of solutions in the fields of motion and positioning. PI does not only develop and produce a broad range of positioning stages and actuators for linear, rotary and vertical motion or combinations of different axes. PI also adapts those solutions to customer-specific applications or supplies finished subsystems for motion and positioning.
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- Nanopositioning Piezo Flexure Stages Nanopositioning Piezo Flexure Stages
- Multi-Axis Piezo Flexure Stages Multi-Axis Piezo Flexure Stages
- PIFOC® Objective & PInano® Sample Scanners for Microscopy PIFOC® Objective & PInano® Sample Scanners for Microscopy
- Linear Piezo Flexure Stages Linear Piezo Flexure Stages
- XY Piezo Flexure Stages XY Piezo Flexure Stages
- Piezo Flexure Tilting Mirrors Piezo Flexure Tilting Mirrors
- Multi-Axis Piezo Flexure Stages
- Miniature Stages Miniature Stages
- Miniature Linear Stages Miniature Linear Stages
- Miniature Rotation Stages Miniature Rotation Stages
- Miniature Hexapods Miniature Hexapods
- Miniature Linear Stages
- Linear Stages Linear Stages
- Stages with PIMag® Magnetic Direct-Drive Linear Motor Stages with PIMag® Magnetic Direct-Drive Linear Motor
- Stages with Stepper, DC & Brushless DC (BLDC) Motors Stages with Stepper, DC & Brushless DC (BLDC) Motors
- Vertical Stages with Stepper, DC & Brushless DC (BLDC) Motors Vertical Stages with Stepper, DC & Brushless DC (BLDC) Motors
- Miniature Linear Stages Miniature Linear Stages
- Stages with PIMag® Magnetic Direct-Drive Linear Motor
- Linear Actuators Linear Actuators
- PiezoMike for Long-Term Stability PiezoMike for Long-Term Stability
- Linear Actuators with Stepper & DC Servo Motors Linear Actuators with Stepper & DC Servo Motors
- PIMag® VC Voice Coil Actuators with High Dynamics & Force Control Option PIMag® VC Voice Coil Actuators with High Dynamics & Force Control Option
- PiezoMove Lever Actuators PiezoMove Lever Actuators
- Nanopositioning Piezo Actuators Nanopositioning Piezo Actuators
- PiezoWalk® Actuators with High Force & Stability PiezoWalk® Actuators with High Force & Stability
- PiezoMike for Long-Term Stability
- Rotation Stages Rotation Stages
- XY Stages XY Stages
- Hexapods Hexapods
- Engineered Systems Engineered Systems
- Fast Multi-Channel Photonics Alignment Fast Multi-Channel Photonics Alignment Systems
- Piezoelectric Transducers & Actuators Piezoelectric Transducers & Actuators
- Air Bearings & Stages Air Bearings & Stages
- Controllers & Drivers Controllers & Drivers
- Nanopositioning Piezo Controllers Nanopositioning Piezo Controllers
- Piezo Drivers for Open-Loop Operation of Piezo Actuators Piezo Drivers for Open-Loop Operation of Piezo Actuators
- Motion Controllers & Drivers for Linear, Torque, Stepper & DC Servo Motors Motion Controllers & Drivers for Linear, Torque, Stepper & DC Servo Motors
- Controllers & Drivers for Piezomotors Controllers & Drivers for Piezomotors
- Controller Systems for Multiple Axes & Mixed Drive Types Controller Systems for Multiple Axes & Mixed Drive Types
- Hexapod Motion Controllers Hexapod Motion Controllers
- ACS Motion Control ACS Motion Control for Industrial Applications
- Nanopositioning Piezo Controllers
- Sensors, Components & Accessories Sensors, Components & Accessories
- ApplicationsApplications & MarketsPI positioning systems are employed where technology is pushed forward in industry and research. This is done, for example, in semiconductor manufacturing, in medical engineering, in biotechnology, in plant engineering, in surface metrology, or in astronomy.
- Hexapods Support Industrial Robots Hexapods Support Industrial RobotsBecause the need for multi-axis and also precision robots in production and quality processes is on the increase, industry is looking out for new types of robotics. PI offers parallel-kinematic hexapods for these tasks.
- Scientific Instrumentation Scientific InstrumentationThe term "scientific instrumentation" covers a variety of different applications, starting with microscopy via beamline processes through to the wide field of laboratory automation.
- Hexapod Systems for ALMA Hexapod Systems for ALMA
- Double-Crystal Monochromator Double-Crystal Monochromator for an X-Ray Spectrometer
- Materials Research in High Vacuum Materials Research in High Vacuum
- Active Vibration Isolation with Piezo Actuators Active Vibration Isolation with Piezo Actuators
- Drive Technology for the ELT Drive Technology for the ELT
- Hexapod Systems for ALMA
- Semiconductor Technology Semiconductor TechnologyLithographic processes are the reason why chips are getting smaller and smaller and why extremely fine structures can be realized on silicon wafers. Piezo drives have made these technical advances possible with their performance and reliability.
- Microscopy MicroscopyImaging processes increase efficiency across a number of fields, ranging from medical engineering to pharmaceutical research and manufacturing of semiconductors.
- Atomic Force Microscopy AFM Scanner for Atomic Force Microscopy
- High-Speed Microscopy High-Speed Microscopy for Quality Control
- White light interferometry 3-D Surface Inspection With Piezo-Based Positioning Systems from PI
- Atomic Force Microscopy
- Silicon Photonics Silicon PhotonicsSilicon photonics allows data rates into the Tbit/s range and is therefore suitable for computer-aided services that require the highest possible transmission speeds.
- Photonics Packaging Automated Photonics Packaging
- Optical Fiber Alignment Simultaneous Testing of Optical Components in Silicon Photonics
- Photonics Packaging
- Medical Technology Medical TechnologyProgress in pharmaceutical research, diagnostics, and therapy requires high-performance and precise position systems. In addition to high positioning precision, requirements for the drives often include compact dimensions, low energy consumption, speed, and high reliability.
- Endoscopy Chip-on-the-Tip Video Endoscopes with Miniature Drives
- Ophthalmology High-Precision Drives in Ophthalmic Surgery
- Magnetic Resonance Imaging Nonsensitive Drives for Magnetic Resonance Therapy
- Optical Coherence Tomography Piezo Technology and Optical Coherence Tomography (OCT)
- Pipetting Piezomotors for Pipetting and Nanodispensing
- Precision Dosing Dynamic Drives for Precision Dosing with Nanodispensers
- Micropumps Piezoelectric Micropumps – Compact Design and High Performance
- Image Stabilization Image Stabilization and Microscanning with Piezo Scanners
- Confocal Microscopy Adjustment of the Focal Planes in Confocal Microscopy
- Adaptive Diaphragm Positioning Adaptive Diaphragm Positioning
- Materials Research Materials ResearchEfficiency has become an important buzzword these days. Materials research has paid a major contribution as the results have, for example, optimized processing methods. Methods such as X-rays and lasers or white light interferometry demand precise positioning of the specimens to be examined and of optics or beam control.
- Parallel Kinematics for Materials Research High-Load Parallel Kinematics for Materials Research
- Laser Beam Control Piezo Drives for Laser Beam Control
- Parallel Kinematics for Materials Research
- Mechanical Engineering Mechanical EngineeringMechanical engineering and manufacturing technology require fast, reliable and energy-saving drive components. The spectrum ranges from piezo actuators to six-axis parallel kinematics which can communicate directly with CNC controls.
- Electrical Discharge Machining Piezo Actuators Accelerate Electrical Discharge Machining
- Hexapods in Mechanical Engineering Hexapods in Mechanical Engineering
- Electrical Discharge Machining
- Automation AutomationPiezo drives, magnetic direct drives, and hexapods are part and parcel of automation today. They operate precisely and reliably and have proven themselves under rugged conditions.
- Smarter Motion Positioning Smarter Motion Positioning
- Hexapods in Microproduction Hexapods in Microproduction
- Hexapods for Quality Assurance Hexapods for Quality Assurance
- Magnetic Direct Drives Magnetic Direct Drives
- Motion Simulation with Hexapods Motion Simulation with Hexapods
- Flexibility in Dimensional Measuring Hexapod Systems in Automation
- Motion Compensation with Hexapods Motion Compensation with HexapodsDynamic hexapods with piezo drives: Best conditions for motion compensation.
- Fast Piezo Ultrasonic Drives Advance Technology Fast Piezo Ultrasonic Drives Advance Technology
- Smarter Motion Positioning
- Beamline Instrumentation Beamline InstrumentationScientific experiments pose their own challenges, and beamline X-ray experiments are even more special in themselves. However, the need for precision equipment is universal.
- Tomography Equipment Tomography Equipment
- Synchrotron Spectroscopy in Vacuum Synchrotron Spectroscopy in Vacuum
- Beam Preparation Beam Preparation
- Sample Positioning for Tomography Sample Positioning for Tomography
- Microscopy Microscopy
- Accelerator Technology Accelerator Technology
- Tomography Equipment
- Additive Manufacturing Additive ManufacturingDue to their high dynamics and pushing forces piezo actuators are highly suitable for the use in machines for additive manufacturing.
- TechnologyKnow-How & TechnologyPI combines its long-term experience in micro and nanopositioning technology with in-depth knowledge in the fields of mechanics, electronics, sensor engineering, and software. Thus, PI is able to offer its customers the most advanced drive technologies and system solutions.
- Piezo Technology Piezo TechnologyPI Ceramic offers a wealth of experience in the manufacturing of piezoceramic materials, components, and actuators. The piezoceramic materials can be adapted individually to perfectly fit the later use of the piezo components.
- Fundamentals of Piezo Technology Fundamentals of Piezo TechnologyPhysical basics and explanations of piezo electricity and electromechanics.
- Properties of Piezo Actuators Properties of Piezo Actuators
- Piezoceramic Materials Piezoceramic MaterialsPI Ceramic offers a variety of different piezoelectric materials including lead-free materials.
- Manufacturing Technology Manufacturing Technology
- PICMA® Technology PICMA® Technology
- Integrated Piezo Actuators Integrated Piezo Actuators
- DuraAct Patch Transducer Technology DuraAct Patch Transducer Technology
- Fundamentals of Piezo Technology
- Piezoelectric Drives Piezoelectric DrivesDepending on the configuration and control, piezoceramic actuators can be used to create translational motions or as motors with a virtually unlimited travel range. The choice of drive depends on the requirements of the application.
- Piezo Actuators Piezo Actuators with and without Guiding
- PiezoWalk® Walking Drives PiezoWalk® Walking Drives
- PILine® Ultrasonic Piezomotors PILine® Ultrasonic Piezomotors
- Piezo Inertia Drives Piezo Inertia Drives
- PiezoMike Linear Actuators PiezoMike Linear Actuators
- Comparison: Piezo Motors & Drive Technologies Comparison: Piezo Motors & Drive Technologies
- Piezo Actuators
- Electromagnetic Drives Electromagnetic DrivesRotating electric motors such as DC or stepper motors are used in connection with screw or worm drives. Stepper motor systems with high-resolution encoders can perform minimum incremental motions of 10 nm with high reliability and repeatability.
- Rotating Electric Motors Rotating Electric Motors from PI
- PIMag® Magnetic Direct Drives PIMag® Magnetic Direct Drives
- PIMag® 6-D Magnetic Levitation PIMag® 6-D Magnetic Levitation at Six Levels of Freedom
- Hybrid Concept Piezo & Motor Hybrid Concept
- Rotating Electric Motors
- Parallel Kinematics Parallel KinematicsIn a parallel-kinematic, multi-axis system, all actuators act directly on a single moving platform. This means that all axes can be designed with identical dynamic properties, thus reducing the moved mass considerably. Hexapods are used for moving and precision positioning, aligning and displacing loads in all six degrees of freedom, i.e., three linear and three rotational axes.
- Parallel Kinematics Piezo Positioning Systems with Parallel KinematicsIn a parallel-kinematic, multi-axis system, all actuators act directly on a single moving platform.
- Multi-Axis Positioners Multi-Axis Positioners and Stewart Platforms
- Hexapod as Motion Simulator Hexapod as Motion SimulatorMotion simulators have higher motion dynamics requirements (shakers).
- Software for Hexapods Hexapod 6-Axis Motion Controller and Software
- Parallel Kinematics
- Sensor Technologies Sensor TechnologiesThe linearity and repeatability achieved are not possible without highest-resolution measuring devices. Accuracies in the range of a few nanometers and below require a position measurement method that can also detect motion in this range.
- Capacitive Sensors Capacitance Nanosensors
- Incremental Sensors Linear Scale Encoders for Nanometrology & Nanopositioning
- PIOne Optical Nanometrology Encoder PIOne Optical Nanometrology Encoder
- Comparison: Position Sensor Technologies Comparison: Nanopositioning Sensor Technologies
- Capacitive Sensors
- Controllers & Software Controllers & SoftwareFast settling or extremely smooth low speed motion, high positional stability, high resolution and high dynamics – the requirements placed on piezo systems vary greatly and need drivers and controllers with a high degree of flexibility.
- Digital & Analog Interfaces Digital & Analog Interfaces
- EtherCAT Connectivity of PI Products EtherCAT Connectivity of PI Products
- Control of Piezo Actuators Piezo Controllers & Drivers for Nanopositioning Systems
- Digital Motion Controllers Digital Motion Controllers
- Software Motion Control Software from PI
- Digital & Analog Interfaces
- Guiding Systems & Force Transmission Guiding Systems & Force TransmissionFlexure joints, mechanical guide components or magnetic bearings? Which kind of guiding system PI uses in its products depends on parameters such as travel range, required precision, load, lifetime, and ambient conditions.
- Classical Guiding Systems Comparison: Classical Guiding Systems and Force Transmission
- Flexure Guiding Systems Flexure Guiding Systems for Nanopositioning & Piezo Actuators
- Magnetic Bearings Magnetic Levitation & Precision Bearings for NanopositioningMagnetic levitation allows excellent guiding accuracy in a plane, both linear and rotational.
- PIglide Air Bearing Technology PIglide Air Bearing TechnologyMulti-axis motion with nanometer precision and without friction.
- Classical Guiding Systems
- Vacuum Vacuum Compatible Linear & Rotary Stages, UHV PositionersCareful handling, adequate premises: PI does not only have the necessary equipment for the qualification of materials, components and final products, but also has many years of experience with regard to HV und UHV positioning systems.
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Digital Motion Controller for Precision, Dynamics, and Operating Convenience
Digital piezo controllers have several advantages over analog servo circuits, in particular for high-precision positioning tasks: Linearity and settling behavior can be specifically influenced by digital algorithms. The result is higher precision and better dynamic performance.
Linearization to Optimize Positioning Accuracy
Linearization of the Mechanical System
The linearity of the entire system is one criterion for its positioning accuracy. Piezo actuators typically show a nonlinearity of 10 to 15 %, which has to be compensated by the control loop.
Digital controllers use higher-order polynomials to reduce the motion nonlinearity to values below 0.001 %, which, for a typical travel range of 100 µm, corresponds to an accuracy of one nanometer and better.
Linearization of the Electronics
All digital PI controllers for nanopositioning act the same. This allows any piezo device tuned to a digital control to also be operated by other controllers without any loss of performance. The required comparison data are stored on an ID chip in the stage and called up by the controller prior to start-up.
Dynamic Digital Linearization
In addition, the Dynamic Digital Linearization (DDL) reduces the deviation of repeated periodic trajectories during motion.
This is relevant for scanning applications, where a specific position must be identified and later be approached with high precision, or for applications where a trajectory must be followed for processing steps.
Controllers and Servo Techniques
The task of a servo loop is to correct deviations between the actual position and the target position. Commonly, this is done with proportional and integral controllers with notch filters. However, depending on the application, other control techniques can yield better results in combination with linearization algorithms. Digital filters avoid undesired mechanical excitation, suppress noise and thus increase the resolution of the system.
State Space Control
An alternative control concept is offered for nanopositioning systems: Advanced Piezo Control. This is based on a state space controller which, in turn, is based on a model of the positioning system. Advanced Piezo Control actively dampens the resonance frequency, in contrast to conventional proportional, integral, and differential (PID) controllers with a notch filter, where the mechanical resonance is cut out of the excitation spectrum. The result is faster settling times and a lower sensitivity to external interferences. Phase fidelity is significantly improved compared to damping with one or even two notch filters. This has direct effects on path fidelity and settling behavior.
If the mechanical system has too many resonances close together, or if the resonance frequency to be damped is 1 kHz or more, then the state controller no longer has any advantage over conventional PID controllers in this form. Please discuss your application with us.
Plug-and-Play: ID Chip
The ID chip contains the relevant data of the stage and thus allows fast configuration on the motion controller which supports the ID chip. Depending on the type of drive, the data read out ranges from the type of stage through to individual operating parameters. In the case of piezo-based positioning systems, the best results are achieved by individual comparison of the operating parameters. These depend on the individual stage.
If digital electronics are tuned once, these parameters are stored in the ID chip of the stage. They are therefore automatically available again for operation at a different digital controller, without the need for new adaptation. This exchangeability between stage and controller is a significant step forward for the flexible use of the systems.
Operating Convenience of Digital Controllers
Computing power and memory size which go hand in hand with digital controllers allow useful additional functions to be implemented.
- Software access to all motion parameters and the graphic display of the results
- Coordinate transformation for parallel kinematics for simple control in Cartesian coordinates
- Macro memory to store and retrieve motions which can be triggered externally
- Function generator and waveform memory for the retrieval of predefined trajectories and the generation of customized waveforms
- Data recorders record sensor and control data for subsequent processing
Not every function is available for all controllers. For details, please refer to the corresponding product datasheets.
Digital Controllers Provide Precision, Dynamics and Ease of Operation10/2017English